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ENERGY, DEPARTMENT OF has floated a tender for 5kW Microwave Plasma CVD System. The project location is USA and the tender is closing on 25 Jul 2025. The tender notice number is 5-S176-Q-00652-00, while the TOT Ref Number is 123099573. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.
Procurement Summary
Country: USA
Summary: 5kW Microwave Plasma CVD System
Deadline: 25 Jul 2025
Other Information
Notice Type: Tender
TOT Ref.No.: 123099573
Document Ref. No.: 5-S176-Q-00652-00
Financier: Self Financed
Purchaser Ownership: Public
Tender Value: Refer Document
Purchaser's Detail
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Login to see detailsTender Details
Description
The purpose of this purchase is to satisfy the needs of the Autonomous Discovery LDRD PRJ1012745 and get a CVD reactor (full assembly or kit version) for the synthesis of single crystal boron doped diamond (BDD) fully forward compatible with the autonomous operation vision of the project:
Microwave (2.45 GHz) Driven Chemical Vapor Deposition reactor or kit assembly with at least 2.5 kW of power, 5 kW is ideal. Present a large loading port to allow for, at a minimum, loading of 1 inch substrate holders, ideally this number should be two inch. Overall, something like a ICF152 is ideal to allow for easy loading and unloading of a 2” Mo puck substrate holder. Vacuum gate valve on the main ICF152 loading port. Have the ability to automatically tune the microwave power delivery, while being integrated with a circulation, dummy load, and waveguide assembly. Present multiple ICF70 viewports (at least 8) for future in-situ characterization. At least four of those should be placed at an angle for future in-situ ellipsometry integration. Present MFC configuration to allow for synthesis of BDD: four MFCs configured for H2, CH4, O2, and a flexible final H2 MFC for the boron precursor. Pressure controller with associated gauges PLD controller and process software with associated control computer and electronics. Overall, fully automated recipe/computer driven operation is critical.
Please provide the following no later than noon CDT on Friday, July 25, 2025:
Appendix “A” Argonne Terms and Conditions for Commercial Items and Services, ANL-71-COM, dated 2/13/2023 (REVIEW AND ACCEPT) Proposal with details supporting the technical capability and adherance to the provided specifications (please remove pricing from this proposal) Lead Time Country of Origin (must be more than 65% USA-manufactured to be considered "Made in USA" Ship from Address Completed and signed ANL-70 Request for Quotation Completed and signed ANL-70B Reps and CertsPlease send any ques...
Active Contract Opportunity
Notice ID : 5-S176-Q-00652-00
Related Notice
Department/Ind. Agency : ENERGY, DEPARTMENT OF
Sub-tier : ENERGY, DEPARTMENT OF
Office: ARGONNE NATL LAB - DOE CONTRACTOR
General Information
Contract Opportunity Type: Solicitation (Original)
Original Published Date: Jul 21, 2025 06:03 pm EDT
Original Date Offers Due: Jul 25, 2025 12:00 pm EDT
Inactive Policy: Manual
Original Inactive Date: Jul 25, 2025
Initiative: None
Classification
Original Set Aside:
Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
NAICS Code: 423490 - Other Professional Equipment and Supplies Merchant Wholesalers
Place of Performance: IL 60439 USA
Documents
ANL-70-Request-for-Quotation.doc
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