Procurement Summary
Country : Finland
Summary : 200 Mm Coating and Developing Track Tool
Deadline : 29 Apr 2025
Other Information
Notice Type : Tender
TOT Ref.No.: 116998101
Document Ref. No. : 203470-2025
Financier : Self Financed
Purchaser Ownership : Public
Tender Value : Refer Document
Purchaser's Detail
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Login to see detailsTender Details
THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated mask aligner. The technical specification of the object of the tender is described in more detail in this Annex 1 of the invitation to tender. The Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1. A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting . A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. The object of the tender process is described in more detail in the invitation to tender documents. Partial tenders will not be accepted. OPTIONS (mandatory) The following are mandatory options (to be offered): - Maintenance contract (See section Maintenance contract option), ...
Document Type: Contract Notice
Reference Number: VTT 24/206/2025
Contract Type: supplies
Authority Type: pub-undert
Doc Title: 200 mm coating and developing track tool
Dispatch Date: 2025-03-28
Publish Date: 2025-03-31
Submission Date: 2025-04-29
Documents
Tender Notice