VTT TECHNICAL RESEARCH CENTRE OF FINLAND LTD has floated a tender for 200 Mm Coating and Developing Track Tool. The project location is Finland and the tender is closing on 29 Apr 2025. The tender notice number is 203470-2025, while the TOT Ref Number is 116998101. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.

Expired Tender

Procurement Summary

Country : Finland

Summary : 200 Mm Coating and Developing Track Tool

Deadline : 29 Apr 2025

Other Information

Notice Type : Tender

TOT Ref.No.: 116998101

Document Ref. No. : 203470-2025

Financier : Self Financed

Purchaser Ownership : Public

Tender Value : Refer Document

Purchaser's Detail

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Tender Details

THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated mask aligner. The technical specification of the object of the tender is described in more detail in this Annex 1 of the invitation to tender. The Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1. A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting . A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. The object of the tender process is described in more detail in the invitation to tender documents. Partial tenders will not be accepted. OPTIONS (mandatory) The following are mandatory options (to be offered): - Maintenance contract (See section Maintenance contract option), ...
Document Type: Contract Notice
Reference Number: VTT 24/206/2025
Contract Type: supplies
Authority Type: pub-undert
Doc Title: 200 mm coating and developing track tool
Dispatch Date: 2025-03-28
Publish Date: 2025-03-31
Submission Date: 2025-04-29

Documents

 Tender Notice


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