TECHNISCHE UNIVERSITEIT DELFT has floated a tender for Icp Oxide Etcher. The project location is Netherlands and the tender is closing on 02 Apr 2022. The tender notice number is 163057-2021, while the TOT Ref Number is 51871574. Bidders can have further information about the Tender and can request the complete Tender document by Registering on the site.

Expired Tender

Procurement Summary

Country : Netherlands

Summary : Icp Oxide Etcher

Deadline : 02 Apr 2022

Other Information

Notice Type : Tender

TOT Ref.No.: 51871574

Document Ref. No. : 163057-2021

Competition : ICB

Financier : Self Financed

Purchaser Ownership : -

Tender Value : Refer Document

Purchaser's Detail

Purchaser : TECHNISCHE UNIVERSITEIT DELFT
Address : Stevinweg 1
Town : Delft
NUTS-Code : NL - Nederland
Postal Code : 2628 CN
Contact Point : Jordy Rog
Phone : +31 628743101
Netherlands
Email :procurement@tudelft.nl
URL :http://www.tudelft.nl

Tender Details

Document Type : Prior information notice without call for competition

Title : ICP Oxide Etcher

Reference Number : 2021/S 065-163057

Contract Type : Supplies

Description : At this moment KN wants to replace a 20+ year old oxide etcher. The KN is seeking an ICP-RIE system, with RF bias, capable of running recipes with high SiO2 etch rate (about 1 um/min) to a 50 um depth and with 5-10 um wide trenches on 4 inch wafers and smaller samples.



38000000 - Laboratory, optical and precision equipments (excl. glasses)

Authority Type : Body governed by public law

Type of Procedure : Not applicable

Regulation : European Union, with participation by GPA countries

Bid Type : Not applicable

Doc Title : Laboratory, optical and precision equipments (excl. glasses)

Dispatch Date : 2021-03-31

Publish Date : 2021-04-02

Submission Date : 2022-04-02

Documents

 Tender Notice