Procurement Summary
Country : Netherlands
Summary : Icp Oxide Etcher
Deadline : 02 Apr 2022
Other Information
Notice Type : Tender
TOT Ref.No.: 51871574
Document Ref. No. : 163057-2021
Competition : ICB
Financier : Self Financed
Purchaser Ownership : -
Tender Value : Refer Document
Purchaser's Detail
Purchaser : TECHNISCHE UNIVERSITEIT DELFT
Address : Stevinweg 1
Town : Delft
NUTS-Code : NL - Nederland
Postal Code : 2628 CN
Contact Point : Jordy Rog
Phone : +31 628743101
Netherlands
Email :procurement@tudelft.nl
URL :http://www.tudelft.nl
Tender Details
Document Type : Prior information notice without call for competition
Title : ICP Oxide Etcher
Reference Number : 2021/S 065-163057
Contract Type : Supplies
Description : At this moment KN wants to replace a 20+ year old oxide etcher. The KN is seeking an ICP-RIE system, with RF bias, capable of running recipes with high SiO2 etch rate (about 1 um/min) to a 50 um depth and with 5-10 um wide trenches on 4 inch wafers and smaller samples.
38000000 - Laboratory, optical and precision equipments (excl. glasses)
Authority Type : Body governed by public law
Type of Procedure : Not applicable
Regulation : European Union, with participation by GPA countries
Bid Type : Not applicable
Doc Title : Laboratory, optical and precision equipments (excl. glasses)
Dispatch Date : 2021-03-31
Publish Date : 2021-04-02
Submission Date : 2022-04-02
Documents
Tender Notice