Procurement Summary
Country : Germany
Summary : Fraunhofer Iof - E_066_245216 - Clean Room-compatible Laboratory Line for Lithographic Processes
Deadline : 06 May 2021
Other Information
Notice Type : Tender
TOT Ref.No.: 43504708
Document Ref. No. : 210294-2020
Competition : ICB
Financier : Self Financed
Purchaser Ownership : -
Tender Value : Refer Document
Purchaser's Detail
Purchaser : FRAUNHOFER SOCIETY FOR THE PROMOTION OF APPLIED RESEARCH E. V. VIA THE GERMAN EVERGABE AWARD PORTAL
Address: Hansastrasse 27c
Town: Munich
NUTS code: DE212 - Munich, district-free city
Postal Code: 80686
Germany
Email :fraunhofer@deutsche-evergabe.de
URL :http://www.fraunhofer.de
Tender Details
Document Type: Corrigendum / Additional information (Please refer tender document)
Title: Fraunhofer IOF - E_066_245216 - clean room-compatible laboratory line for lithographic processes
Reference Number: E_066_245216 migl-bla
Contract Type: Supplies
Description: The Fraunhofer Institute for Applied Optics and Precision Engineering is planning to set up a clean room-compatible laboratory section for carrying out photolithographic processes. This consists of 2 wet workbench modules, 2 centrifugal coating systems and 3 heating plates. The wet workbench modules are installed in separate laboratory areas, each with a spin coater, whereby the workbench is designed with heating plates for coating processes, while the workbench is equipped with the different baths for development and downstream processes. As possible, storage space below the work surface should be used for the storage of containers or equipment accessories (chucks). Ideally, the substrate holders of the spin coater can be exchanged with one another.
42990000 - Miscellaneous special-purpose machinery
42900000 - Miscellaneous general and special-purpose machinery
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