Contract notice: Miscellaneous special-purpose machinery Tender, Germany - 26986918

Procurement Summary

Country : Germany

Summary : Contract notice: Miscellaneous special-purpose machinery

Deadline : 22 Oct 2018

Other Information

Notice Type : Tender

TOT Ref.No.: 26986918

Document Ref. No. : 411669-2018

Competition : ICB

Financier : Self Financed

Purchaser Ownership : -

Tender Value : Refer Document

Purchaser's Detail

Purchaser : FRAUNHOFER GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. ÜBER VERGABEPORTAL DEUTSCHE EVERGABE
Office Name: Fraunhofer Gesellschaft zur Förderung der angewandten Forschung e.V. über Vergabeportal deutsche eVergabe
Address: Hansastr. 27c
Town: Munich
Postal Code: 80686
Germany
Email :fraunhofer@deutsche-evergabe.de
URL :http://www.fraunhofer.de

Tender Details

Object of the contract
Miscellaneous special-purpose machinery

Description: Contract notice: Miscellaneous special-purpose machinery

Authority Type: Other
Contact Nature: Supplies
Procedure: Competitive procedure with negotiation
Document: Contract notice
Regulation: European Union, with participation by GPA countries
Award criteria: The most economic tender
CPV code: 42990000, 42990000
CPV Description: Miscellaneous special-purpose machinery.

ALD-System

Reference Number : E_039_222571 ChrPat-bla FMD

The FhG ISIT plans to purchase an ALD-System for the deposition of dielectrics and high k material on 3/5 semiconductor surfaces. Here, the main focus is on depositing gate dielectrics for GaN devices. The tool is designed for 0200 mm wafers providing an automatic single wafer handling system with a loadlock for wafer transfer under vacuum. The tool should be able to perform a cleaning and conditioning step of the wafer surface prior to the ALD deposition. The system is capable of thermal-, plasma- and mixed-mode- atomic layer deposition processes over a wide temperature range. The system should also support an easy change of the process chamber. We are interested in your preferred solution to deposit the materials as displayed in the table below. In order to gain the best technical solution: Please provide details of the recommended precursor materials for the offered ALD deposition tool.

Main Site : 25524 Itzehohe

The FhG ISIT plans to purchase an ALD system for the deposition of dielectrics and high k material on 3/5 semiconductor surfaces. Here, the main focus is on depositing gate dielectrics for GaN devices. The tool is designed for 0200 mm wafers providing an automatic single wafer handling system with a loadlock for wafer transfer under vacuum. The tool should be able to perform a cleaning and conditioning step of the wafer surface prior to the ALD deposition. The system is capable of thermal-, plasma- and mixed-mode- atomic layer deposition processes over a wide temperature range. The system should also support an easy change of the process chamber. We are interested in your preferred solution to deposit the materials as displayed in the table below. In order to gain the best technical solution: Please provide details of the recommended precursor materials for the offered ALD deposition tool.

The documents listed below must be presented in full with the offer. Incomplete documents may lead to the exclusion of the proceedings.

1) Company profile and the actual amount of employees;

2) Designation of the company revenue for the last 3 business years;

3) Self-declaration regarding the lack of exclusion criteria pursuant to § 123 and § 124 of the German Act Against Restraints of Competition (GWB);

4) Excerpt from the Central Trade Register according to § 150a GewO (is requested by the client).

— request of documents — available at: The award documents can be retrieved exclusively through the award portal of the German e-Vergabe at www.deutsche-evergabe.de. With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in english only, exclusively via e-mail to the contact point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers.

Pursuant to section 9 Par. 3 S. 2 VGV (German Public Procurement Regulation), the contract notice and the award documents are available to you at the German eVergabe with or without registration.

Please note that registration is required for requests to participate, tender submissions and tenderer questions.

We therfore recommend early registration, also in order to receive any tenderer information; you otherwise be arthe risk of possible tender exclusion.


Internet address (URL): http://www.fraunhofer.de

Documents

 Tender Notice